- Production Equipment & Materials
Airgard's point-of-use fume scrubber can reduce a process tool's scrubber-related downtime to zero. Whether running epitaxial, metal etch, poly etch or CVD, the patented scrubbing technology, automated gas inlet plunger and custom scrubber inlets are tailored to individual processes to provide maximum uptime and process stability. Airgard, Inc. was founded in 1988 by brothers Mark and Kris Johnsgard. While working as facilities and process development engineers for large epitaxial service companies, Mark and Kris took on a challenge. The Epi reactors they worked on were plagued with downtime and process problems due to poorly designed gas scrubbers. Mark and Kris applied their physics degrees and their hands-on experience to the problem and created the Airgard gas scrubber.